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地 址:广东省东莞市南城区莞太大
      道255号福地5栋C7-C9

微波等离子CVD系统
Microwave plasma CVD systems


AX6600 System

The AX6600 microwave plasma system is designed to operate with plasma at high power densities for large area, high deposition rate processes to meet the scale-up needs for diamond coated tool insert manufacturers. This complete turnkey system incorporates the latest microwave technology with computer control for ease of use.
A large batch size, covering an area of 8 inches in diameter, can be processed all at once. It is a highly flexible design which can be operated in a wide range of power from 15kW to 100kW.

Features:
  Large throughput
  Easy to use
  Production capability
  Computer-controlled, turnkey operation
  Reliable, stable reproducible,versatile operation
  Extensive after-sales process support and training







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